Infrared detectors ua lub luag haujlwm tseem ceeb hauv kev tshawb nrhiav tub rog, kev paub txog tej thaj chaw deb, kev sib txuas lus, kev taw qhia meej, aerospace thiab lwm yam kev lag luam, thiab tau txais kev saib xyuas ntev los ntawm cov teb chaws thoob ntiaj teb, nrog rau kev tshawb fawb tseem ceeb thiab kev cia siab rau daim ntawv thov. Kev sib koom ua ke ntawm micro-nano qauv thiab cov khoom siv hluav taws xob ib txwm muaj tuaj yeem txhim kho lub photon coupling efficiency thiab sib npaug ntawm txoj kev kho qhov muag, tawg los ntawm kev txwv kev nqus ntawm cov khoom siv ib txwm muaj, txhim kho quantum efficiency ntawm optoelectronic li thiab txo qhov tsaus nti tam sim no. cov cuab yeej, uas yog ib tus neeg sib tw rau siab -kev ua tau zoo infrared detectors. Kev tshawb fawb muab cov txuj ci tshiab. Kev taw qhia txog kev ua haujlwm siab -kev ua tau zoo kho qhov muag txuas thiab sub- wavelength optical teb cov teebmeem hauv zos siv micro-nano cov qauv, ua ke nrog lub zog qib optimization ntawm tsoos semiconductor pab kiag li lawm thiab lwm yam kev tswj los txhim kho lub zuag qhia tag nrho kev ua tau zoo ntawm detectors, tau dhau los ua ib qho chaw ua haujlwm thiab muaj kev vam meej ntawm infrared detectors. kev tshawb fawb qhia.
According to Memes Consulting, recently, researcher Shi Haofei's research group from the Micro-Nano Manufacturing and System Integration Center of Chongqing Institute of Green Intelligent Technology, Chinese Academy of Sciences published a "Micro-Nano Structure Enhanced Infrared Detector" in the journal "Infrared and Laser Engineering". A review article on the topic of "Research Progress". Researcher Shi Haofei is mainly engaged in the research of graphene material preparation, micro-nano processing technology, infrared detection devices and so on.
Txoj kev tshawb no nthuav dav cov kev tshawb fawb ntawm ntau hom micro-nanostructure- txhim kho infrared detectors nyob rau xyoo tas los no. Ua ntej, lub hauv paus ntsiab lus ntawm kev txhim kho infrared ntes nrog micro-nano qauv tau qhia, thiab kev faib tawm thiab kev sib piv yog ua raws li cov khoom sib txawv thiab kev ua haujlwm ntawm micro-nano qauv. Kev tshawb fawb kev kawm ntawm micro-nano qauv hauv infrared detectors tau nthuav tawm; Thaum kawg, txoj kev loj hlob ntawm kev txhim kho infrared detectors raws li micro-nano qauv yog sau thiab prospected.
Silicon-Raws li Infrared Detector nrog Microhole Array Structure
Nyob rau hauv lub tshav pob ntawm infrared detectors, lub micro-nano qauv yog siv los txhim kho cov coupling efficiency thiab nqus npaum li cas ntawm photons, thiab thaum tuav lub optical teb ntawm lub ntaus ntawv, lub thickness thiab ntim ntawm lub nqus txheej txheem ntawm lub ntaus ntawv. raug txo qis, yog li txo qhov tsaus ntuj tam sim no ntawm lub cuab yeej thiab txhim kho qhov kev tshawb pom tus nqi ntawm lub cuab yeej. Tam sim no, micro-nano cov qauv siv hauv kev tshawb fawb ntawm infrared detectors feem ntau suav nrog: nruab nrab-hom micro-nano qauv, hlau nto-hom micro{{5 }}nano cov qauv, thiab peb -dimensional plasmonic kab noj hniav-hom micro-nano qauv. Qhov no yog kev txhim kho ntawm kev ua tau zoo ntawm infrared detectors los ntawm microstructure, uas yog thawj zaug tshwm sim nyob rau hauv cov nyhuv antireflection ntawm ib qho teeb meem spectrum los yog ib tug dav spectrum band. Qhov nce ntxiv ntawm lub teeb pom kev zoo ntawm lub ntsuas ntsuas txhais tau hais tias cov ntaub ntawv nqus cov txheej txheem tuaj yeem siv tau, thiab micro-nano qauv nws tus kheej tuaj yeem txo qhov ntim ntawm cov duab photosensitive ntawm lub cuab yeej, uas ua rau qhov tsaus ntuj nti. tam sim no ntawm cov cuab yeej ntsig txog cov khoom ntim tau txo qis. , yog li txhawm rau txhim kho kev tshawb pom tus nqi thiab kev ua tau zoo ntawm infrared detectors.
Kev siv cov micro-nano cov qauv kom ua tiav ntau- qhov kev tswj xyuas qhov ntev ntawm cov khoom siv hluav taws xob ntawm cov khoom siv hluav taws xob infrared thiab nws cov kev tshawb fawb txog kev tshawb fawb yog qhov tseem ceeb ntawm kev tshawb fawb infrared tam sim no, thiab nws kuj yog ib qho tseem ceeb rau kev taw qhia. txoj kev loj hlob ntawm ib tiam tshiab ntawm infrared detectors yav tom ntej. Micro-nano qauv infrared kuaj xyuas cov cuab yeej tseem ntsib teeb meem thiab cov teeb meem xws li cov txheej txheem kev sib raug zoo, kev ua haujlwm tsis zoo, thiab tus kheej- kev hloov kho muaj peev xwm los txhim kho. Micro-nano qauv- txhim kho cov cuab yeej ntsuas hluav taws xob yuav tsum tau tsom mus rau cov lus qhia tshawb fawb hauv qab no hauv kev txhim kho yav tom ntej: (1) CMOS- siv tau microstructure nrhiav pom cov cuab yeej qauv tsim qauv thiab kev siv thev naus laus zis; (2) Tib lub sijhawm, nws muaj broadband, siab rhiab heev, thiab suab nrov tsawg. Micro-nano qauv infrared nrhiav tshuab nrog cov khoom zoo xws li cov lus teb ceev thiab cov lus teb ceev; (3) Cov cuab yeej hloov kho nrog lub peev xwm tswj tau zoo xws li cov lus teb spectrum. Nrog rau hauv- kev kawm tob ntawm cov ntaub ntawv tshiab, cov qauv tshiab, thiab cov txheej txheem tshiab ntawm cov cuab yeej kuaj pom yav tom ntej thiab kev nce qib ntawm kev sib koom ua ke thev naus laus zis, micro-nano qauv- txhim kho infrared Cov cuab yeej kuaj xyuas yuav qhia tau tias muaj peev xwm zoo rau daim ntawv thov, muab kev sib koom ua ke siab, kev ua haujlwm siab thiab qis-cov nqi ntsuas hluav taws xob infrared muab cov kev daws teeb meem tshiab.
The first author of this article is Zhu Peng, an assistant researcher at the Center for Micro-Nano Manufacturing and System Integration, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences. He is mainly engaged in the research of micro-nano optical devices, the preparation of two-dimensional materials, and the development of new infrared detection devices.
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